Especificaciones
| Connection Vacuum Inlet Flange | DN 160 CF (8") |
| Connection vacuum outlet flange | DN 25 ISO-KF (NW25) |
| Cooling Method | Refrigeración por aire (convección) Refrigeración por aire (forzada - ventilador) Refrigeración por agua |
| Supply Voltage | DC 48V |
| Power Total Rated | 600.00 |
| Pumping Speed Air Nitrogen (@50Hz or max @default setting) | 0.680 |
| Presión final | 1.000 × 10⁻⁸ |
TURBOVAC 850 i - DN 160 CF UHV (Anybus)
Variante
Explore la gama de variantes que se indican a continuación para comparar el producto
| Short Description | Numero de parte | variantTmpPerformanceModel |
|---|---|---|
| 840071V1000 | TURBOVAC i - Interfaz 1 (básico) | |
| 840071V2000 | TURBOVAC i - Interfaz 2 (extensión Anybus/Fieldbus) | |
| 840071V3000 | TURBOVAC iX - Controlador Xtention box | |
| 840071V3300 | TURBOVAC iX - Controlador Xtention box | |
| 840072V1000 | TURBOVAC i IND - Versión industrial - Interfaz 1 (básico) | |
| 840073V1000 | TURBOVAC i(X) UHV - Versión de vacío ultra alto - interfaz 1 (básico) | |
| 840073V2000 | TURBOVAC i(X) UHV - Versión de vacío ultra alto - Interfaz 2 (extensión Anybus/Fieldbus) | |
| 840081V1000 | TURBOVAC i - Interfaz 1 (básico) | |
| 840081V2000 | TURBOVAC i - Interfaz 2 (extensión Anybus/Fieldbus) | |
| 840081V3000 | TURBOVAC iX - Controlador Xtention box | |
| 840081V3300 | TURBOVAC iX - Controlador Xtention box | |
| 840083V1000 | TURBOVAC i(X) UHV - Versión de vacío ultra alto - interfaz 1 (básico) | |
| 840083V2000 | TURBOVAC i(X) UHV - Versión de vacío ultra alto - Interfaz 2 (extensión Anybus/Fieldbus) |
TURBOVAC i/iX
TURBOVAC i is a well-proven turbomolecular pump platform ranging from 90 to 1450 l/s. TURBOVAC i comes with the latest hybrid bearing design offering a permanent magnet upper bearing paired with an oil-free lower mechanical bearing offering the cleanest high vacuum conditions.
With TURBOVAC i we offer variants covering UHV (Ultra High Vacuum), throughput IND (Industrial) as well as iR (radiation robust) variants with remote electronics. TURBOVAC i pumps are available with a compact interface offering the control of up to two accessories, basic RS485, USB and DIGITAL I/O control. The TURBOVAC i series also offers the full spectrum of field bus support. The universal connection called "Anybus" enables communication via Profibus, Ethernet IP, ProfiNET as well as EtherCAT through selectable modules.
TURBOVAC iX also offers the Anybus interface, the ability to control your fore vacuum pump, and up to 6 accessories, a gauge interface turning the pump into a full vacuum control solution. Along with single inlet pumps, we offer a wealth of multi-inlet, cartridge pumps, and customized products via our Customer Focused Engineering team - please come and talk to our sales teams.
TURBOVAC i pumps, in general, come stand-alone - the suitable power supply unit, comms/power cables, and cooling options need to be ordered separately. TURBOVAC 1350, 1450 and the 850, 950 IND variants always come already equipped with a water cooling block.
TURBOVAC 850 i - DN 160 CF UHV (Anybus)
UHV variants provide highest compression for light gases to ensure lowest ultimate pressures even with basic backing pumps. It can be operated in any orientation. This product comes without any additional cooling device - an air cooler or a water cooling block need to be ordered separately. As an electronic interface this product comes with the advanced interface Anybus slot. Interface cards (Fieldbus, Serial Bus) are not included in the scope of supply and need to be ordered separately.
Features and Benefits
- Superior performance - high pumping speed for light gases combined with highest compression
- Provides class leading light gas compression leading to lowest ultimate pressure of < 1e-10 mbar
General Product Information
| Accessories / Scope of Supply | TURBOVAC i pumps come stand-alone - the suitable power supply unit, comms/power cables, and cooling options need to be ordered separately. IND industrial variants come with an equipped water cooling unit and are water cooling only. |
| Connection Cooling |
Conexión rápida de manguera flexible de 6x1 mm
1/8" BSPP (G) Hembra |
| Connection vacuum outlet flange | DN 25 ISO-KF (NW25) |
| Connection Vacuum Inlet Flange | DN 160 CF (8") |
| Cooling Method |
Refrigeración por aire (convección)
Refrigeración por aire (forzada - ventilador) Refrigeración por agua |
| Dimensión de altura | 0.292 |
| Longitud de cota | 0.266 |
| Dimensión de anchura | 0.241 |
| IP Rating |
IP40
IP54 |
| Supply Frequency | Tensión CC |
| Supply Voltage | DC 48V |
| Peso | 19.70 |
| Comentarios de Dimensión | The dimensions length, width and height try to describe the outer shape of this particular product in its typical orientation when standing on the ground. We always recommend checking the detailed dimensions given in 2D drawings in the instruction manual or the 3D shapes given in 3D models. |
| Conexión Brida de Entrada / Salida | DN 160 CF (8") | DN 25 ISO-KF (NW25) |
| ProductCertification |
CE
UL CSA |
| connectionPurgeGasBallastVentConnector |
1/8" BSPP (or G 1/8") Female
1/8" BSPP (or G 1/8") Female |
Environmental Conditions
| Temperatura ambiente de funcionamiento máx. | 40.00 |
| Temperatura ambiente de almacenamiento máx. | 70.00 |
| Temperature Ambient Operation Min | 5.00 |
| Temperatura ambiente de almacenamiento mín. | -15.00 |
| Magnetic Field Resistance Max (covering worst direction - come and consult us for more details) | 9.000 × 10⁻³ T |
Classification
| Dry or Wet Pump | Dry |
| Product Pressure Range |
High Vacuum: 1·10⁻³ - 1·10⁻⁷ mbar
Ultra High Vacuum: 1·10⁻⁷ - 1·10⁻¹¹ mbar |
| High / Medium / Rough Vacuum Classification | Bomba de alto vacío |
| Vacuum Pump Technology | Turbomolecular Pump - hybrid bearing oil free |
Performance Data
| Relación de compresión de nitrógeno en aire | 1.000 × 10¹³ |
| Relación de compresión de helio | 5.000 × 10⁹ |
| Relación de compresión de hidrógeno | 3.000 × 10⁸ |
| Power Total Rated | 600.00 |
| Presión final | 1.000 × 10⁻⁸ |
| Pumping Speed Air Nitrogen (@50Hz or max @default setting) | 0.680 |
| Velocidad de bombeo, argón | 0.610 |
| Velocidad de bombeo, helio | 0.790 |
| Velocidad de bombeo, hidrógeno | 0.710 |
| Tiempo de rampa ascendente | 150.00 |
| Velocidad de rotación nominal | 820.00 |
| Comentario de rendimiento | The compression of a TMP is a value describing how good the design can compress a gas type at special conditions. Compression data is measured only using the CF flange variants. The values are stated for all family members. For some pump classes we are stating different pumping speeds ISO > CF flange as small differences in geometry influence their performance leading to a difference >5%. |
| Gas Throughput Air Nitrogen Max | 0.400 |
| Gas Throughput Helium Max | 0.700 |
| Rendimiento máx. de gas hidrógeno | 1.70 |
| Gas Throughput Argon Max | 0.260 |
| Pressure Backing Max | 1200.00 |
| Relación de compresión de argón | 1.000 × 10¹³ |
Connectivity - Communication Interface
| Communication Interface Protocol | Protocolo de interfaz serie universal USS |
| Communication Interfaces Customer |
Conector ANYBUS (preparado para IP54) para todos los módulos
REMOTO X1 (E/S PARALELA) USB |
| Connection electrical comms interface connector |
Conector ANYBUS (preparado para IP54) para todos los módulos
DSUB HD 15 PINES - Hembra (alta densidad) USB tipo B - Hembra |
Variants
| Installation | Cualquier orientación |
| variantTmpPerformanceModel | TURBOVAC i(X) UHV - Versión de vacío ultra alto - Interfaz 2 (extensión Anybus/Fieldbus) |
Operation Conditions - Limitations
| Flujo de agua de refrigeración mín. | 1.667 × 10⁻⁵ |
| Temperatura máx. del agua de refrigeración | 35.00 |
| Temperatura mín. del agua de refrigeración | 15.00 |
| Flujo de agua de refrigeración máx. | 3.000 × 10⁻⁵ |
| Pressure Permissible Cooling Water - Min and Max |
4.000 × 10⁵
4.000 × 10⁵ |
- 301019041_002_Instructions.pdf - English - Instructions
- 300855170_002_Instructions.pdf - English - Instructions
- 3610-0041-02-TURBOVACi.pdf - English - Sales Material
- 3610 0041 02_TURBOVACi_HR.pdf - English - Sales Material
- Elevator_Pitch_Turbovac_EN_DE_Leybold_160817.pdf - English, German - Sales Material
- Elevator_Pitch_TurbovacIX_EN_DE_Leybold_160817.pdf - English, German - Sales Material
- 301019041_003_Instructions.pdf - French - Instructions
- 300855170_003_Instructions.pdf - French - Instructions
- 301019041_001_Instructions.pdf - German - Instructions
- 300855170_001_Instructions.pdf - German - Instructions
- 300855170_004_Instructions.pdf - Italian - Instructions
- 300855170_012_Instructions.pdf - Japanese - Instructions
- 300855170_014_Instructions.pdf - Korean - Instructions
- 300855170_011_Instructions.pdf - Simplified Chinese - Instructions
- 300855170_026_Instructions.pdf - Traditional Chinese - Instructions